氮化铝(AIN)薄膜的光学特性研究

Study on optical Property of aluminum nitride thin film

研究了宽禁带Ⅲ－Ｖ族化合物半导体氮化铝（ＡＩＮ）薄膜的折射率及其热光特性，采用棱镜──薄膜耦合装置和自动温控光波导测试仪，测出不同温度下氮化铝薄膜的波导特性，利用迭代法可得到ＡＩＮ的折射率与温度变化的关系，并首次测得了ＡＩＮ薄膜的热光特性。

The refractive index and thermo-optic property of the wide bandgap -V com-pound semiconductor of nitride Aluminum nitride (AlN) thin film has been investigatal. Theweveguide property of AlN thin film under different tempemtures is measured using a prism-thinfilm coupling device and an automatic temperature controlling wnveguide measuring device.The dependence of the refractive index of AlN on changing temperature is obtained withiteration method. The thermo-optic property of AlN thin film is measured for the first time.