非接触型双功能磁敏旋转传感器的研究

Non-contact Magneto Rotation Sensor for Double Functions

本文报道了一种非接触型双功能碰敏旋转传感器，能同时测量磁性旋转体的旋转速度和旋转方向。它由利用半导体平面工艺在ＩｎＳｂ单晶片上制成的桥式连结的ＩｎＳｂ电阻和永磁铁构成。分析了旋转传感器的核心敏感元件ＩｎＳｂ磁敏电阻及传感器的电路结构、工作原理。对传感器的特性进行了测量，实验结果符合理论设计。

This paper describes a kind of non-contact magneto rotation sensor for double functions. Such rotation sensor is enable to detect the rotational velocity and direction of a rotating body. It consists of a permanent magneto, two pairs of InSb magneto resistors in bridge. The InSb magneto resistor using InSb crystal is fabricated by semiconductor processing. The characteristics of the sensor has been measured. The results agree with the theoretical design.