面阵CCD在大尺寸形位误差测量中的应用(英文)

Application of Matrix CCD for Measuring Geometrical Deviation in Large Scale

本文介绍了在半导体激光光纤和位相板相结合的准直情况下，利用面阵CCD探测器测量大尺寸形位误差的原理，并针对二维位相板衍射图像的特点，提出了一种处理此类衍射图样的图像处理新方法──正交投影法，消除了CCD表面保护玻璃形成的干涉条纹的影响，对空气扰动也起到了很好的抑制作用，并且使二维图像处理变为一维计算，大大提高了计算速度.此面阵CCD测量系统与双频激光干涉仪测量直线度误差的比对实验结果表明，二者的测量结果符合得很好，说明测量系统有很高的可信度。

This paper describes a principle of measuring large scale geometrical deviation using matrix CCD as detector bed on laser.diode fiber and phase plate alignment technique. According to the characteristics of phase plate diffracted image,a hew image processing algorithm-orthogonal projecting method is proposed. The algorithm can eliminate the effect of intehaence fringes leaded to by the glass window of a CCD and air turbulence is averaged at the same time. Since the algorithm can transfer the processing of a two-dimension image into two one -dimension images,the processing procedure becomes vety simple and fast. Comparing with HP5528,the experiment result shows that the accuracy of the system coincides with.the one of HP528 in straightness measurement.