钽铝薄膜中功率衰减器的设计

Design a Middling-power Ta/Al Thin Film Attenuator

介绍了一种用于微波电路的中功率薄膜衰减器的设计与制作。该衰减器是由铝原子含量为50％的Ta／Al合金薄膜制成。测试结果表明其性能优良。

In this paper,design and fabracation of a middling-power thin film attenuator for microwave circuits are described. The attenuator is made from a Ta/Al thin film which contains aluminium of 50%. Finally, the rneasured data of experiment indicates that the attenuator has high performance.