光栅横向位移遥测传感器的焦深分析

Analysis of Focal Depth of Lateral Remote Displacement Measuring System Based on Grating Doppler Effect

本文研制了基于光栅多普勒效应的横向位移遥测传感器，破测位移和光束方向垂直:成功地实现了2～50米的远距离光栅横向位移测量。针对不同的测量光路在理论和实验上提出并证明了系统焦深范围的计算公式。本系统分辨力为0.4μm。

A transducer for lateral remote displacement measurement based on grating Doppler effect is introduced in this paper. The Direction of movement is allowed to be perpendicular to the blsector of laser beams.With this system, the grating's d1iplacement measurements at the distance from 2m to 50m have been achieved Experimentally. The most important is, for different optical systems. the focal depth and its calculating method are obtained theoretically and verified practically. Equations are presented. Its resolution is 0. 4μm.