多温区空间晶体生长炉的解耦预测控制研究

On Decoupling Predictive Control of Multi-zone Furnace for Space Crystal Growth

通过传热机理分析,推导出了多温区晶体生长炉的简化线性模型,使用递推最小二乘法辨识了模型参数。研究了解耦预测控制,改进了预测控制性能指标的选取方法,不需要在线调节前馈增益矩阵,提高了控制的实时性。对系统进行控制仿真,结果表明,该控制方法具有良好的控制精度,为该方法的实际应用奠定了基础。

A simplified linear model of multi-zone furnace was derived by mechanic analyzing,and the recursive least-squares estimation was used to obtain the parameters of this model.Studying on the decoupling predictive control,the choice of feed-forward gain matrix in the cost function was improved.Without adjusting the feed-forward gain online,the controller is more applicable.Simulation indicates the efficiency and accuracy of the controller as the basic work for future application.