摘要
借助于低温下标准样品的霍耳测量分析方法,测定了[111]晶向同[211]晶向(111)面上的杂质浓度分布,为制得径向上杂质浓度分布较均匀的材料指出了一条有效途径。
By means of measuring hall effect of standard samples at low tempera-tures,the distribution of impurities on plane (111) of 〈111〉 and 〈211〉orientations are determined,which points out an effective way to prepare material with homogeneous distribution of impurities at radial orientations.
关键词
InSb单晶
霍尔系数
测量
杂质
浓度
InSb single crystal
Hall effect measurement
Distribution of impurities