STM管式扫描器交叉耦合及非正交误差的研究

A STUDY ON CROSS COUPLING ERROR AND NONORTHOGONAL ERROR OF THE STM TUBE SCANER

由于扫描隧道显微镜（ＳＴＭ）管式扫描器自身结构的不完善，在运动过程中会产生一定的结构误差，交叉耦合误差和非正交误差是其中两项重要的误差．本文对这两项误差进行了定量的理论分析，得到了相应的误差公式及误差曲线，并通过实验验证了理论推导结果的正确性．最后，根据对误差产生原因的研究，文中还提出了一些相应的误差补偿措施．

Owing to its structural defects,the scanning tunneling microscope tube scanner will cause structural errors when moving.Of the errors the cross coupling error and nonorthogonal error are the two important structural errors.In this paper these two errors are analyzed theoretically and quantitatively.The error formula and relation curves are obtained.All the results are verified in experiments,and some error compensating methods are presented.