高速扫描三坐标测量机动态误差模型

A DYNAMIC ERROR MODEL FOR CMMS DURING HIGH SPEED SCANNING MEASUREMENT

用三坐标测量机进行高速扫描测量时，由于机体的振动会产生较大的动态误差。本文研究了扫描三坐标机在高速运动中的动态特性．找出了产生动态误差的根源．文中根据过程辨识原理，将三坐标测量机看作线性动力系统，用实验方法建立了动态误差的ＡＲＭＡ模型，并将Ｋａｌｍａｎ滤波器应用于模型之中，消除了测量噪声对参数辨识的影响，提高了系统辨识的精度．最后对一台移动桥式三坐标测量机成功地进行了动态误差补偿。

When a three coordinate measuring machine (CMM) is working in high speed scanning measurement.big dynamic errors occur because of the machine vibration.The dynamic behavior of CMM during fast probing is studied in this paper.and the error sources are found out.According to the process recognizing theorem.CMM is looked as a linear system,and an ARMA model for dynamic error is established through experiment.A Kalman filter is used in the model in order to eliminate the influence of measuring noise,thus the precision of the system recognizing is improved.The dynamic errors of a moving bridge CMM are compensated successfully at last.The errors now are at least 60 percents less than before.