摘要
边缘电场传感器是一种电容式传感器,由于具有单边穿透、信号强度可调及层析成像等优点,被广泛应用于工业过程控制中非接触测量。但是边缘电场不均匀分布,很难建立传感器解析模型,求解被测对象物理特性的逆问题难度很大。本文研究了交叉指电极边缘电场传感器连续建模方法,并在此基础上,利用广义特征值求解介电特性参数,仿真结果验证了算法的有效性。
Fringing Electric Field sensors which belong to capacitive sensor are widely used in nondestructive testing of industry process controlling ,with the advantage of one-side access, controllability of signal strength, imaging capability, etc. However,it is difficult to model analytically and solve the inverse problem because of nonhomogenous electric field distribution. This paper focuses on the continuum model of the fringing electric field sensor with interdigital electrodes. And then,the dielectric parameter is solved by generalized eigenvalue based the continuum model. The simulation result shows this method can estimate the parameter effectively.
出处
《科技通报》
北大核心
2010年第5期708-711,共4页
Bulletin of Science and Technology
基金
高等学校博士学科点专项科研基金(编号:200803591019)
关键词
边缘电场
交叉指型
建模
逆问题
fringing electric field
interdigital sensor
modeling
inverse problem
