射流圆孔靶的制备和靶参数测量

Fabrication and Measurement of Hole Targets in Jets Experiment

介绍了X射线激光射流实验中Al和CH两种射流圆孔靶的制备方法。分别采用精密机械和皮秒激光加工工艺在Al和CH薄膜上制备精密、微小的圆孔,再通过精密装配的方法获得射流圆孔靶。使用白光干涉仪和小型量测仪对射流圆孔靶进行靶参数测量,测量图像和数据表明,Al和CH薄膜圆孔的孔径较圆且两面大小一致性较好,靶的两层薄膜分界面清晰且连接紧密。

The hole targets in X-ray laser jets experiments were fabricated.Holes were drilled by drill press in Al and CH films by machine and pico-second laser.The hole targets were assembled by precision assemblage and measured by Wyko NT 1100 surface profiler and 2 dimensions coordinate measuring machine.The apertures are fine and the same between face and con-face,and the interface of layers are connected closely and seem clear.