期刊文献+

硅微机械陀螺仪温度控制系统的PID算法实现 被引量:3

Temperature Control System of Silicon Micromachined Gyroscope Realized by PID Algorithm
下载PDF
导出
摘要 温度的变化对硅微机械陀螺仪的性能有较大的影响,对温度的稳定性控制有着重要意义。分析了硅微机械陀螺仪的温度影响机理,通过对表头测试得到性能参数随温度变化的规律。介绍了PID控制算法的基本概念,对其进行了系统仿真,并在实际的温控系统中完成了试验验证,试验结果表明利用PID算法实现的温控系统具有良好的控制效果。 As there is a large drop in silicon micromachined gyroscope's performance when temperature changes,it is significant to control the stability of the temperature.Analysis is made on the general influence of temperature variation on silicon micromachined gyroscope.The relationships between performance parameters and temperature changing are studied by some tests on gyroscopes.The basic concepts of PID control algorithm are introduced,and software simulation is carried out.Then the control effect is testified in a realistic temperature control system.Experimental results show that the temperature control system realized by PID algorithm has an evident control effect.
出处 《测控技术》 CSCD 北大核心 2010年第8期4-7,12,共5页 Measurement & Control Technology
基金 国防预研项目支持(6922002055)
关键词 硅微机械陀螺仪 温度控制 PID算法 silicon micromachined gyroscope temperature control PID algorithm
  • 相关文献

参考文献4

二级参考文献12

  • 1陈怀,张嵘,周斌,陈志勇.微机械陀螺仪温度特性及补偿算法研究[J].传感器技术,2004,23(10):24-26. 被引量:38
  • 2Yazdi N, Ayazi Najafi K. Micromachined Inertial Sensors[C]// Proc. IEEE, Aug. 1998,1,86(8) : 1640-1659.
  • 3Green GA Progress in Integrated Gyroscope[J]. Aerospace and Electronic Systems Magazine, 2004,19( 11 ).
  • 4Hong K S. Compensation of Nonlinear Thermal Bias Drift of Resonant Rate Sensor Using Fuzzy Logic[J]. Sensors and Actuators, 1999,78 : 143-148.
  • 5杨波.硅微陀螺仪测控技术研究[D].南京:东南大学,2007.
  • 6Annovazzi-Lodi V.Mechanical-thermal noise in micromachined gyros[J].Microelectronics Journal,1999,30 (12):1227-1230.
  • 7Roessig T A, Howe R T, Pisano A E Nonlinear mixing in surface-micromachined tuning fork oscillators. IEEE International Frequency Control Symposium, 1997:778-782.
  • 8Tsou C F, Fang W L. The effect of residual stresses on the deformation of semi-circular micromachined beams. J. Micromech. Microeng, 2000, 9(10): 34-41.
  • 9William A C. Micromachined vibratory rate gyroscope:[PhD Dissertation]. Department of Engineering & Electrical Engineering and Computer Science, Berkeley, 1997.
  • 10William A C. Micromachined vibratory rate gyroscopes,U.S. Patent, No.6067858, 2000.

共引文献13

同被引文献27

  • 1王淑娟,吴广玉.惯性器件温度误差补偿方法综述[J].中国惯性技术学报,1998,6(3):44-49. 被引量:32
  • 2陈怀,张嵘,周斌,陈志勇.微机械陀螺仪温度特性及补偿算法研究[J].传感器技术,2004,23(10):24-26. 被引量:38
  • 3许敏 ,李少远 ,蔡文剑 .PID控制器参数调整的滚动优化算法[J].自动化学报,2005,31(3):459-463. 被引量:3
  • 4何晓磊,苏岩.采用DDSOG工艺加工Z轴微机械陀螺仪实验[J].东南大学学报(自然科学版),2005,35(4):545-548. 被引量:3
  • 5王寿荣.硅微型惯性器件理论及应用[M]南京:东南大学出版社,200022-34.
  • 6Fang Jiancheng,Li Jianli. Integrated model and compensation of thermal errors of silicon micro electro mechanical gyroscope[J].IEEE Transactions on lnstrumentation and Measurement,2009,(09):2923-2930.
  • 7Xia D Z,Chen S L,Wang S R. Microgyroscope temperature effects and compensation-control methods[J].Sensors,2009,(10):8349-8376.
  • 8Lee S H,Cho J,Lee S W. A low-power ovencontrolled vacuum package technology for high-performance MEMS[A].Sorrento,Italy,2009.753-756.
  • 9Xu Lu;Yang Bo;Wang Shourong.Research on thermal characteristics and on-chip temperature-controlling for silicon micro-gyroscope[A]广东深圳,2011807-812.
  • 10Xu Lu,Yang Bo,Wang Shourong. On-chip temperature-control technology for silicon micro-gyroscope[J].Key Engineering Materials,2011.228-231.

引证文献3

二级引证文献9

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部