摘要
讨论了微小光学的发展和异形孔径(正方形和六角形)微透镜阵列的制作。自聚焦透镜的制作加速了微小光学的产生,微透镜阵列器件的应用,促使微小光学迅猛发展,异形孔径微透镜阵列的研制,开创了微小光学新的研究领域。重点对异形自聚焦透镜和异形孔径微透镜阵列的理论和实验研究工作进行讨论,给出了有益的结果。
The progress in microoptics and the fabrication of special-shaped aperture microlens array are reviewed.Microoptics is produced on the fabrication of gradient-index lens.The rapid progress of microoptics is urged by the application of microlens array.A new domain of microoptics is founded by the fabrication of special-shaped aperture microlens array.The theoretical and experimental researches on special-shaped gradient-index lens and special-shaped aperture microlens array are mainly discussed and useful results are presented.
出处
《激光与光电子学进展》
CSCD
北大核心
2010年第8期1-16,共16页
Laser & Optoelectronics Progress
基金
国家自然科学基金(60578005
60978046)资助课题
关键词
微小光学
微透镜阵列
异形孔径
光刻离子交换工艺
microoptics microlens array special-shaped aperture photoetching ion-exchange technique