摘要
针对含有离轴非球面的两镜光学系统,利用三阶矢量波像差理论建立了离轴抛物面主镜的波像差模型和系统内失调量与波像差泽尼克多项式系数的关系模型。在对复杂光学系统的粗装调完成后,利用高精度的自准干涉检测以得到系统各个视场的干涉图,处理后得到系统的波像差,并以泽尼克多项式系数表示;对比理想系统的波像差得到系统波像差的变化量,代入失调模型中,计算出系统元件失调量,以此为依据对系统进行调整。以无遮栏、大口径、长焦距离轴二镜光学系统为模型进行了仿真计算,结果表明,基于矢量波像差理论的计算机辅助装调技术可行,并可用于大型光学系统的装调。
In order to solve the problems in the alignment of the off-axis aspherical optical system,the relationship between system wavefront aberration and Zernike coefficient is investigated based on vector aberration theory.The model of off-axis paraboloidal mirror and misalignment optical system is built.By collecting interferograms of several fields of optical system by means of autocollimating interferometry,the Zernike coefficient of coma and astigmatism can be obtained from those interferograms.Compared with the coefficients calculated by the software,the changes of the Zernike coefficients are obtained and the misalignment values of the system are then calculated with the model.The feasibility of this model using the CODE V software is analyzed.The results demonstrate that the alignment scheme is feasible and guidable to the alignment of complex optical system.
出处
《激光与光电子学进展》
CSCD
北大核心
2010年第8期90-96,共7页
Laser & Optoelectronics Progress
关键词
光学设计
应用光学
计算机辅助装调
矢量波像差
泽尼克多项式系数
离轴抛物面
optical design applied optics computer-aided alignment vector aberration Zernike polynomial coefficient off-axis paraboloid
