衬底温度对脉冲激光沉积类金刚石薄膜的影响

Influence of the Substrate Temperature upon the Diamond-Like Carbon Films Deposited by Pulsed Laser

在脉冲激光沉积法制备类金刚石薄膜的实验中,保持其他实验参数不变,衬底温度分别取30,200,400和600℃来沉积类金刚石薄膜。用拉曼光谱仪和X射线光电子能谱仪对不同衬底温度下沉积的类金刚石薄膜的微观结构和组成进行检测分析;用原子力显微镜对不同衬底温度下沉积的类金刚石薄膜的表面形貌进行检测分析。实验结果表明,衬底温度对脉冲激光沉积法制备的类金刚石薄膜的微观结构与组成,sp3/sp2比值以及薄膜的表面形貌都有显著的影响。衬底温度升高导致各种碳离子和石墨大颗粒在衬底表面的迁移率提高,从而导致薄膜中sp3/sp2比值减小;石墨晶粒的数量增多、体积增大;薄膜表面的粗糙度降低;大颗粒的数量减少。

The influence of the substrate temperature on the topography and microstructure of the diamond-like carbon（DLC） film in the pulsed laser deposition（PLD） is studied.When the diamond-like carbon films were deposited,the substrate temperature kept at 30,200,400 and 600 ℃ respectively.The microstructure and composition of the diamond-like carbon films deposited at different substrate temperatures were detected by the visible Raman spectroscopy and the X-ray photoelectron spectroscopy（XPS） respectively.The topography of the diamond-like carbon films was detected by the atomic force microscopy（AFM）.The experimental result demonstrates that the substrate temperature influences microstructure,composition,ratio of sp^3/sp^2 and topography of the diamond-like carbon films in the pulsed laser deposition remarkably.When the substrate temperature increases,the ratio of sp^3/sp^2 in the film would decrease,the size and number of graphitic crystallites in the film would increase,the roughness of the film would reduce and the number of granules on the film would decrease.The reason to cause the experimental phenomenon is that transfer ability of the carbon ions and granules on the substrate would increase when the substrate temperature increases.