摘要
本文叙述了当前变容泵的真空度测量中所使用的主要仪器,测量过程中产生的测量误差,通过对比试验分析误差产生的原因和在实际工作中必须注意的问题。本文给出的分析结果和可行性方案对真空厂家和用户在实际应用中有参考意义。
Describes the main instruments currently used for vacuum degree measuring of positive displacement pump,as well as the relevant measurement errors.Analyzes the causes of errors and the problems that have to be solved in practical applications.The results and the feasible programming thus obtained provide a reference which is of significance to relevant manufacturers and users.
出处
《真空》
CAS
北大核心
2010年第4期65-68,共4页
Vacuum
关键词
泵
真空
测量
分析
pump
vacuum
measurement
analysis
