辐射效应对半导体器件的影响及加固技术

The Radiation Effects and Hardened Technologies of Semiconductor Device

与其他半导体器件相比,CMOS集成电路具有功耗小、噪声容限大等优点,对于对重量、体积、能源消耗都有严格要求的卫星和宇宙飞船来说,CMOS集成电路是优先选择的器件种类。随着半导体器件的等比例缩小,辐射效应对器件的影响也在跟着变化。这些影响包括:栅氧化层厚度、栅长的减小、横向非均匀损伤、栅感应漏电流等方面。对于微电子器件的抗辐射加固,文章就微电子器件的应用场合、辐射环境的辐射因素和强度等,从微电子器件的制作材料、电路设计、器件结构、工艺等多方面进行加固考虑,针对各种应用环境提出加固方案。

To contrast with other device,CMOS has advantages on less power,noise martin.To satellites and spaceship are concerned,CMOS is the first choice.The radiation effect for semiconductor scaling was described.It is included：thickness of oxide of gate,scaling of gate,GIDL.Then,the radiation hardened of devices was introduced,in detail.For difference application,we give the difference ways to hardened.