高温超导滤波器两种刻蚀方法的研究

Research of two kinds of etching methods for the high temperature superconducting filter

在高温超导滤波器的制备过程中,针对所使用的高温超导薄膜的特点,采用了两种刻蚀方法——湿化学刻蚀法和离子束刻蚀法,设计对比了两种刻蚀的制作流程及其优缺点,并用两种方法分别制备了高温超导滤波器,对微波特性做了对比分析。得出离子束刻蚀对超导薄膜的性能影响要小一些,用此方法制备的高温超导滤波器具有更好的微波特性。

According to the characteristics of high temperature superconducting（HTS） films,we adopted two kinds of etching methods,i.e.wet chemical etching and ion etching in fabrication processes of the HTS filters.We designed fabricating processes and compared the advantages and disadvantages of two methods.Then we fabricated HTS filters by two etching methods and got the HTS filters＇ performance.The results show that the ion etching has little influence on the performance of HTS film and the HTS filter performance is better.