制作工艺误差对X射线组合折射透镜聚焦性能影响研究

Study on the focusing performance of the compound X-ray refractive lenses with fabrication errors

本文主要介绍对X射线组合折射透镜的制作工艺误差对其聚焦性能影响的研究结果.首先给出采用深度X射线光刻技术制作的PMMA材料圆柱面型X组合折射透镜的工艺测试结果,得出制作工艺误差值,定性分析制作工艺误差对X射线组合折射透镜聚焦性能的影响.然后根据实际的制作工艺误差建模,给出详尽的理论分析和定量的理论模拟结果.最后在北京同步辐射装置(BSRF)上,构建基于PMMA材料的圆柱面型X射线组合折射透镜的微束聚焦实验系统,实际测试了有明显工艺误差和尽量消除工艺误差的两种X射线组合折射透镜的聚焦性能,给出实测结果并对实测结果进行分析和讨论.

The compound X-ray refractive lens is a kind of optical components for X-rays focusing and imaging. This paper reports the authors’research on focusing performance of the compound X-ray refractive lens with fabrication errors. Firstly SEM measurements of the semi-cylindrical PMMA compound X-ray refractive lens fabricated by means of deep X-ray lithography are performed, and accordingly the fabrication errors are measured. Then the theoretical analysis and simulations are done for the focusing performance of the compound X-ray refractive lens with the fabrication errors. Finally,X-ray microbeam experimental system is built on the 4W1A beamline of Beijing Synchrotron Radiation Facility （BSRF） for measuring the focusing performance of the semi-cylindrical PMMA X-ray refractive lenses we fabricated. And the focusing performances of the semi-cylindrical PMMA compound X-ray refractive lenses with and without distinct fabrication errors are measured and analyzed under 8 keV monochromatic X-rays.