摘要
A novel design of bimorph deformable mirror (DM) is presented. Compared with the bilayer lead zirconium titanate (PZT) ceramic structure, the bilayer lead magnesium niobate (PMN) ceramic structure has greater surface displacement at the same thickness. The static simulation of the bilayer PMN bimorph deformable mirror with the finite element analysis (FEA) shows that the prototype has a stroke of above ± 23 μm, response time of 3 ms and nearly linear displacement characteristic with voltage rising. The results of simulation indicate that the bilayer PMN bimorph DM can satisfy the basic requirements of adaptive optics (AO) systems.
A novel design of bimorph deformable mirror （DM） is prcsentext. Compared with the bilayer lead zirconium titanate （PZT） ceramic structure, the bilaycr lead magnesium niobate （PMN） ceramic structure has greater surface displacement at the same thickness. The static simulation of the bilaycr PMN bimorph deformable mirror with the finite clement analysis （FEA） shows that the prototype has a stroke of above ± 23μm, response time of 3 ms and nearly linear disphcement characteristic with voltage rising. The results of simuhtinn indicate that the bflayer PMN bimorph DM can satisfy the basic requirements of adaptive optics （AO） systems.
基金
supported by the National Natural Science Foundation of China (No.60908027)
