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微波等离子体的朗缪尔探针测量 被引量:1

Langmuir Probe Measurement of Microwave Plasma
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摘要 随着微波等离子体的应用越来越广泛,其参数的测量研究也逐渐得到人们的重视.本文使用朗缪尔探针测量了微波等离子体的单探针I-V特性,并根据探针测量原理计算出等离子体空间电位、电子温度,电子密度和离子密度等参数. The Microwave plasma technology is widely used and much attention is paid to the research of its parameter. In this paper,the I-V characteristics of the probe were measured and some physical quantities of the plasma,such as its plasma potential,its electron temperature and its electron density were calculated according to the measurement principle of the probe.
作者 张宝芳
出处 《佳木斯大学学报(自然科学版)》 CAS 2010年第4期521-523,共3页 Journal of Jiamusi University:Natural Science Edition
关键词 微波等离子体 朗缪尔探针 测量 microwave plasma Langmuir probe measurement
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参考文献4

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