摘要
The diffraction field distribution of a high density grating with a period of 2.5A is analyzed with the finite- difference time-domain （FDTD） method. The numerical results show the axial spatial evolution of the optical field near the 1/2 Talbot plane of the grating, which is verified by experiment with the scanning near-field optical microscopy （SNOM） technique. It should be helpful for understanding more clearly the diffraction behavior of a high density grating in micro- and nano-optics and be beneficial for applications of the Talbot effect, such as the near-field photolithography.
The diffraction field distribution of a high density grating with a period of 2.5A is analyzed with the finite- difference time-domain （FDTD） method. The numerical results show the axial spatial evolution of the optical field near the 1/2 Talbot plane of the grating, which is verified by experiment with the scanning near-field optical microscopy （SNOM） technique. It should be helpful for understanding more clearly the diffraction behavior of a high density grating in micro- and nano-optics and be beneficial for applications of the Talbot effect, such as the near-field photolithography.
基金
Supported by the National Natural Science Foundation of China under Grant No 60707006, the Natural Science Foundation of the Jiangsu Higher-Education Institutions under Grant No KJD140145, and the Scientific Research Foundation of Nanjing University of Posts and Telecommunications under Grant No NY207006.
