摘要
A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen （Po2） from 0 to 11.7%, and the electrical and magnetic properties of films have been studied. It is shown that optimal Fe43.29 Co19.51Hf7.49 O29.71 films with desired properties can be obtained when the films were prepared under Po2= 5.1%. The films show superior properties of low coereivity, Hc ∽5.5 Oe, relatively high saturation magnetization, 47rMs · 18.3 kG, high anisotropy field Hk ∽ 65 Oe, and high electrical resistivity ρ∽ 2675 μΩ·cm. Permeability spectra shows that the natural ferromagnetic resonant frequency is as high as 3.1 GHz. The combined merits of the film make the films taken as an ideal candidate material for high-frequency applications such as noise suppressor. In addition, the effects of the film thickness and annealing treatment on the magnetic properties are also reported.
A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen （Po2） from 0 to 11.7%, and the electrical and magnetic properties of films have been studied. It is shown that optimal Fe43.29 Co19.51Hf7.49 O29.71 films with desired properties can be obtained when the films were prepared under Po2= 5.1%. The films show superior properties of low coereivity, Hc ∽5.5 Oe, relatively high saturation magnetization, 47rMs · 18.3 kG, high anisotropy field Hk ∽ 65 Oe, and high electrical resistivity ρ∽ 2675 μΩ·cm. Permeability spectra shows that the natural ferromagnetic resonant frequency is as high as 3.1 GHz. The combined merits of the film make the films taken as an ideal candidate material for high-frequency applications such as noise suppressor. In addition, the effects of the film thickness and annealing treatment on the magnetic properties are also reported.
基金
Supported by the National Basic Research Program of China under Grant No 2007CB310407, the National Natural Science Foundation of China under Grant Nos 60721001 and 60771047, and the International S＆T Cooperation Program of China under Grant No 2007DFR10250.
