高真空退火炉模糊自适应温度控制器的研究

The Study on Fuzzy Self-adaptive Temperature Controller of High Vacuum Annealing Furnace

针对高真空退火炉温度分布不均匀,工件温度响应速度慢,易出现较大超调量的特点,本文提出了一种在线参数自适应模糊控制器的设计方案,能实现不同状态下温度的自动控制。实验表明,方案实施切实有效。

For the high vacuum annealing furnace characteristics： temperature uneven distribution, slow workpiece temperature response, prone to large overshoot, this paper presents an online parameter self- adaptive fuzzy controller design, to achieve antomatie control of the temperature under different conditions. Experiments show that the program is workable and effective.