影响EDS分析准确性的因素探讨

An Analysis of the Factors Affecting the Accuracy of EDS

电镜(SEM)和能谱仪(EDS)的联用可以方便且无损地对各种材料进行元素的定性分析、半定量分析甚至定量分析.其对EDS准确性的影响,从样品的制备,加速电压的选择以及重叠峰的识别三个方面进行了分析讨论.

The combined use of SEM and EDS can be instrumental in carrying out non - destructive elemental qualitative analysis, semi -quantitative analysis and even quantitative analysis on a variety of materials conveniently and harmlessly. However, it may affect the accuracy of EDS in the application. This paper discusses the factors involved in the process including the sample preparation, the choice of accelerating voltage as well as the identification of overlapping peaks.