摘要
基于MEMS技术的微发电机体积小、可长期使用,成为研究的热点。目前微发电机主要分为振动式和旋转式两大类:振动式微发电机结构简单,但能量密度小;旋转式微发电机可在高转速下工作,产生高的能量密度。描述了旋转式微发电机的工作原理与特点。着重介绍了旋转式微发电机的研究现状,列举了典型的研究成果,总结了其所用的结构、材料和加工工艺。指出了旋转式微发电机的发展趋势,即寻求简化装配、适合大批量生产的材料与工艺。旋转式微发电机的出现,使"小机器产生大功率"的设想成为可能。
The micro-generator based on MEMS technology becomes a research focus for its small volume and long lifetime.At present,micro-generator can be classified into vibration generator and rotational generator.Vibration generator has simple structure,but low energy density.And rotational generator can operate at very high-speed,so has a high energy density.Operating principle and characteristics of rotational generator were described.Introduced the research situation,including typical research achievements and the summation of the structure,material and process technology of rotational generator.Pointed out development trend of micro generators,sought the marital and process technology which can help simplifying assembling and batch fabrication.Because of the emergence of micro-rotational generator,the dream ＂small machine,high power＂ can come true.
出处
《微电机》
北大核心
2010年第8期75-78,共4页
Micromotors
关键词
微机电系统(MEMS)
旋转式发电机
结构
材料
工艺
Micro electro mechanical system（MEMS）
Rotational generator
Structure
Material
Process
