基于光电技术的圆度测量

Measuring Circularity Based on Photo Electricity Technology

圆度误差的测量是长度计量中一个重要项目,它的测量常转化成对位移的测量。本文采用光电技术对其进行测量,提出了一种基于理想光组轴向放大率理论来实现微位移的放大,并通过采用位置敏感探测器(PSD)将光斑像点的位移转化为电信号的输出,从而实现位移与电信号的转化;在测量圆度的同时,采用圆光栅来测量工件转角,实现整周的圆轮廓实时记录;对于圆度误差的评定采用最小二乘法。

Measuring circularity error is an important job in the field of length measuring,usually it is converted to measure micro-displacement. The paper introduces a new method to amplify micro-displacement based on ideal optical system longitudinal magnification theory. The displacement fluctuation of light spot image is converted to electric signal outputting by PSD（Position Sensitive Detector）.The rotation angle of the workpiece is measured by circular optical grating when measuring the circularity of the workpiece,thus we can acquire the information of completecycle outline real time. Assessment of circularity error uses the method of least square approximation.