摘要
运用法布里-珀罗(Fabry-Perot)干涉技术,将被测元件等效成测量系统的干涉腔,采用相邻干涉极值的判定依据,实现了对固体腔型超窄带梳状滤波器组成元件——未镀膜层固体腔(熔融石英)的高精度厚度测量。该光学测量系统结构简单、温度稳定性好、成本低,完全可以实现以往需采用光谱分析仪才能完成的超精细测量。
According to the theory of Fabry Perot（F-P）interference,choosing flat glass（SiO2）as interferometric cavity of the measurement system,adopting the method of measuring the extremum between two nearby interfered lights,which implemented the measurement of no plating membrane light filter.It is the most importance part of the new ultra-narrow bandwidth filter.The accuracy of the optical measurement system with configuration simpleness,having strong ability of anti-reflective films and low-cost reaches subnanometer level,which ever just can be done using the expensive spectrum analyzer.
出处
《半导体光电》
CAS
CSCD
北大核心
2010年第4期625-628,共4页
Semiconductor Optoelectronics
关键词
梳状滤波器
光学测量
DWDM
F-P法珀干涉
optical comb filter
optical measure
DWDM
Fabry-Perot（F-P） interferometer
