超低速运动装置设计分析

Design and analysis of ultra - low speed movement equipment system

单晶炉提拉装置是提拉法生长晶体的关键设备,由于激光晶体生长机理决定了其生长速度非常缓慢。提拉装置要求长期运行在超低速的状态下,针对运动系统的震动、晃动、摩擦、爬行等都会影响速度的稳定性,采用交流伺服技术对激光单晶炉的提拉装置进行了全新改造设计,并对其精度进行了综合分析。通过采用变增益的PID控制方法长期运行的实验数据表明,该装置运行精度高,稳定性好,适合生长大尺寸激光晶体,同时设计采用通用零件,满足大规模工业化生产的需求。

Czochralski lifting device is the key equipment for crystal growth.Due to laser crystal growth mechanism could decide its slow growth speed,so lifting device is required to operate under the ultra-low speed situation chronically.According to shock,shake,fraction and crawl of movement system affected speed stability,the paper carries out a nobel design to laser Czochralski lifting system through alternated servo technology and its precision is analyzed comprenshensively.The long-term experimental data showed by using changed plus PID control method that the system has high precision and better reliability and it is suitable to grow large-size laser crystal.Meanwhile,the design system makes use of common spare parts and can meet the requirements for large scale industrialization.