低压驱动RF MEMS开关设计与模拟

Design and Simulation of Low-voltage Driving RF MEMS Switches

RF MEMS开关存在驱动电压高、开关时间长等问题,利用ANSYS对电容式开关加以改进,设计扭转臂杠杆与打孔电容膜相结合的新型开关。通过静电耦合与模态分析的仿真,可以在理论上改善RF MEMS开关的射频性能,并有工艺的可行性。

As RF MEMS switches have shortcomings of high-voltage drive and long switching time, a new switch with reverse arm lever and punched capacitance membrane is designed by means of improving the capacitive switches with ANSYS. The RF performance of RF MEMS switches is improved theoretically by the simulation of electrostatic coupling and the modal analysis. The feasibility of the technique process is discussed.