高度有序多孔阳极氧化铝制备工艺的研究

Preparation on the Highly Ordered Porous Anodic Alumina

影响多孔阳极氧化铝(porous anodica lumina,PAA)形貌及结构等的因素有很多,如抛光铝片的表面粗糙度、电解液温度、氧化电压、氧化时间、搅拌速率等。本文采用二次阳极氧化法,以草酸为电解液,研究了高度有序AAO模板制备过程的主要工艺条件,并采用扫描电子显微镜对模板的形貌进行表征。结果表明,在电解液温度为12℃,氧化电压为40V能够得到高度有序的、孔径为80nm左右的多孔阳极氧化铝膜。

There were many factors of porous anodic alumina（porous anodic alumina,PAA） morphology and structure variables,such as the surface roughness of the polished aluminum sheets,solution temperature,applied potential,electropolishing time,agitation rate,etc..The preparation of highly ordered AAO template main process conditions were studied using oxalic acid solution on pure Al substrate and the two-step oxidation method was adopted to fabricate AAO templates.Field-Emission Scanning Electron Microscope（FE-SEM） was used to observe the surface morphology.The experimental results indicated that highly ordered porous anodic alumina film with pore diameter of 80nm can be prepared at 40V,and the electrolyte temperature of 12℃.