镁含量和热处理对Zn_(1-x)Mg_xO薄膜晶体结构的影响

Effect of Mg content and annealingon the crystal structure of Zn_(1-x)Mg_xO films

采用溶胶-凝胶法在玻璃衬底上制备Zn1-xMgxO(x=0.1、0.2、0.3、0.4、0.5、0.6(mol))薄膜.X射线衍射谱测试结果发现,在0.1<x<0.3范围内薄膜仍然保持氧化锌六角形纤锌矿结构,(002)衍射峰向大角度方向移动,当x超过0.3时出现氧化镁立方相.对于Zn0.7Mg0.3O薄膜,在5.0、5.5、6.0℃.min-1的升温速率下,升温速率越快结晶程度越好.在相同升温速率下,随着退火温度从500℃升高到560℃,样品的结晶程度变好,当退火温度达到590℃时结晶程度变差.

The Zn1-xMgxO（x=0.1,0.2,0.3,0.4,0.5,0.6（mol））thin films were prepared on glass substrate by the Sol-Gel method.The X-ray diffraction results showed that when the value of x was between 0.1 and 0.3,the thin film had the structure of hexagonal wurtzite while the angel of the diffraction peak became bigger with x,and the MgO impurity phase segregated at x=0.4.For the sample with x=0.3 annealed at 500℃,the crystal quality of the films was improved with the increase of the rate of temperature rising from 5.0℃·min^-1 to 6.0℃·min^-1.For the same sample,the crystal quality of the films was improved with the increase in annealing temperature from 500℃ to 560℃.With the annealing temperature increasing above 590℃ the crystal quality of the films degenerated.