弹性反冲探测技术分析薄膜中的氢和氦含量

Elastic Recoil Detection Analysis of Hydrogen and Helium Content in Thin Film

给出了用离子束来弹性反冲探测能谱,分析薄膜材料中的轻质元素含量及其深度分布的基本原理和试验方法,并对其发展和应用做了介绍。作为应用举例,用8 MeV的O3+作为入射离子进行弹性反冲金属钛膜中的氢和氦,通过解析能谱获得了氢和氦含量的深度分布曲线。该技术在涉及氢和氦在材料中的行为研究方面将有重要应用。

The essential principle and experimental method of elastic recoil detection （ERD） analysis was presented, that the energy spectrum of recoiled light atoms can be obtained by the incidental ion beam and the concentration and depth profile of light elements can be analyzed. Its development and application was also introduced. For illustration with application of ERD, the probe of 8 MeV O3＋ ion was used to recoil the hydrogen and helium atoms in titanium thin film. The contents and depth profiles of hydrogen and helium were achieved. The ERD analysis was proposed to have important applications in the research work relating to the behavior of hydrogen and helium in materials.