摘要
本文研究可在室温下工作，具有ＬａＦ３（氟化镧）薄膜的ＭＩＳ（金属—绝缘体—半导体）型固态氧传感器，并对其敏感机制进行了讨论。测试并分析了传感器的响应特性。
This paper studies MIS type solid state oxygen sensor with LaF 3 gate electrode working at room temperature. The mechanism of the sensor is analysed. And the response characteristics od the sensor are analysed and tested.
出处
《医疗设备信息》
1999年第2期13-15,共3页
Information of Medical Equipment
关键词
MIS型氧传感器
LaF_3薄膜
室温
C-V特性
MIS type oxygen sensor
LaF 3 gate electrode
room temperature
C V characteristics.
