气相色谱法分析超高纯六氟化钨中杂质气体

GC Analysis for Impurity Gases in Tungsten Hexa-fluoride of Super-purity

采用气相色谱-放电离子化检测器分析超高纯六氟化钨中微量杂质气体的含量。自行设计了一套反吹双通路分析系统,当六氟化钨中的气相杂质进入检测器后,将六氟化钨及时反吹出去,避免六氟化钨对仪器的腐蚀。通过正交试验确定了气相色谱仪的最佳工作参数,确定了采用不同的色谱柱进行分析时,仪器的最佳反吹时间。据此提出了气相色谱法分析六氟化钨中的四氟化碳、二氧化碳、六氟化硫、氧气、氮气和一氧化碳等痕量杂质气体。

A method of GC with discharge ionization detector（DID） for the determination of impurity gases in tungsten hexa-fluoride（WF6） of super-purity was proposed and the installation of binary-channel analytic system for back-blowing was designed.When the impurity gases in WF6 enter into the detector,the matrix WF6 was blown out in time in order to prevent the instrument from corrosion by WF6.By using the orthogonal experimental designing,the optimized working conditions of the GC instrument were selected.The optimum time of back-blowing for using different columns were also studied.Under the optimum conditions,the contents of CF4,CO2,SF6,O2,N2 and CO in WF6 were determined.