摘要
针对目前应用三坐标测量机进行相应测量以及不确定度评定时,其内部软件少有错误数据剔除功能致使测量数据中的粗大误差对评定结果产生一定影响的问题,结合概率论与数理统计理论,讨论了粗大误差的剔除技术.分析了平面最小二乘法拟合的不确定度,研究了结合基于数据剔除方法和最小二乘法的平面不确定度评定方法以及具体实现手段,以平板为例对上述方法进行了实例验证.
At present, there is a lack of method in the internal software of coordinate measuring machine (CMM) to deal with the error data, as a result, the evaluation is influenced. To solve the problem above, methods for excluding error data are discussed in this article based on probability theory and mathematical statistics. Then the least square method for calculating plane uncertainty is analyzed and details in data processing based on the least-squares fitting methods are described. At last an example is given to verify the program. The results show that the schemes discussed in this paper are feasible and have certain application prospects in CMM.
出处
《微电子学与计算机》
CSCD
北大核心
2010年第9期147-150,共4页
Microelectronics & Computer
基金
国家自然科学基金项目(50865003)
广西自然科学基金项目(0640166)
关键词
平面度
不确定度
数据剔除
最小二乘法
flatness
uncertainty
data elimination
least-squares method