异丙醇在硅碱性腐蚀液中的作用

Isopropanol in the role of silicon in alkaline etching solutions

在硅单晶的碱性腐蚀过程中,往往由于碱性腐蚀液对单晶硅的腐蚀速率过快,从而增大了硅单晶片表面的粗糙度。异丙醇有着减缓腐蚀速率的功效因而降低了硅单晶片表面的粗糙度。主要讨论了异丙醇在碱性腐蚀液中的作用原理并对腐蚀实验结果做了分析。

Alkaline corrosion in the process of silicon crystal, often due to alkaline etching solutions on the corrosion rate of silicon too quickly, thus increasing the surface roughness of Si wafers. Isopropanol with the power to reduce corrosion rate and thus reduce the surface roughness of silicon crystal. This article focuses on the IPA＇s role in the basic principle of etching and corrosion test results were analyzed.