太阳能电池生产线中的新型等离子体刻蚀机的研制

Solar Cell Production Line in New Plasma Etching Machine

介绍了用于太阳能电池片生产工艺中的新型等离子体刻蚀机及设备的工作原理、构造、简单的工艺试验结果。与现在生产线上普遍使用的老式等离子体刻蚀机相比,它大大提高了生产产能,减少了设备维护工作量。该设备操作简单,是一种实用、高效的生产型工艺设备。

This article describes for solar cell production process in new plasma etching machine. It’s describes its functions, structures, and a simple process of test results. And it compared to the used of old-fashioned plasma etching machine in widespread production line, which greatly improves productivity, reduces the maintenance effort. This equipment easy to handle, it is a practical and efficient production process equipment.