PVD轴瓦溅射工艺研究

Sputtering technologic disquisition for PVD half bearing

研究目的是为进口柴油机的国产化提供磁控溅射的PVD轴瓦。PVD(Physical Vapor Deposition物理气相沉积)轴瓦属于第四代轴瓦,其特点是用磁控溅射的方法在轴瓦基材的内表面上生成镍栅层(阻挡层)和具有优异性能的铝合金减摩层(跑合层、滑动层),这是研制PVD轴瓦的重点和难点。通过反复试验,得出了影响溅射膜层附着强度、沉积速度、维氏硬度、减摩层断面微观形貌等性能的有关参数的优化值并确定了工艺流程。铝合金减摩层的组分含量、附着强度、维氏硬度等性能达到或优于图纸要求。铝合金减摩层断面微观形貌及软锡(Sn)相颗粒直径和分布状态等性能达到外同类产品或文献报道的水平。

The purpose of study is to offer magnetron sputtering PVD（Physical Vapor Deposition） half bearing for domestic producing import diesel engine.PVD half bearing belong to 4nd generation product,its characteristics is build nickel barrier layer and aluminum alloy（AlSn20Cu1）antiriction layer（or runing layer,or sliding layer）with excellent capability by magnetron sputtering method,which are emphases and difficulty developing for PVD half bearing.By iterative trial,have gained optimizing numerical value for relevant parameter influencing adhere intension,deposition speed,microhardness（Vickers hardness HV）,section microcosmic morphology about aluminum alloy antiriction layer,etc.have excelled result requested by blueprint,capability for sputtering coating,and have confirmed technological flow.Capability about component content,adhere intension,deposition speed,micro hardness（HV）,etc.for aluminum alloy antiriction layer have achieved or exceeded the blueprint need;section micro morphology,grain diameter and distributing state,etc.have achieved the level for the product of the foreign the same type or reportorial by literature.