微结构表面形貌的测量

Measurement of Microstructures Topography

总结了现有各种微结构表面形貌测量方法，概述了这些方法的原理、特性及发展现状，并对各种方法的优越性、存在问题以及应用范围进行了比较。

The existing various methods used to measure the surface topography of micro structures are described. The principle, property and present situation of these methods are analyzed. Comparison for superiority, the existing problems and the applied range of these methods are given.