高矫顽力SmCo/Cr薄膜的制备、结构及磁性

Preparation,Microstructure and Magnetic Properties of High-Coercivity SmCo/Cr Film

通过磁控溅射采用基板水冷方法制备ＳｍＣｏ／Ｃｒ双层膜。薄膜的成分及厚度、薄膜的制备条件，如溅射时的氩气压对薄膜的磁性有较大的影响。通过仔细控制这些参数，制备出矫顽力高达１８１ｋＡ／ｍ的薄膜。

SmCo/Cr bilayer films were prepared on the water-cooled substrates by multigun dc magnetron sputtering system.The composition of SmCo layer and the preparation conditions,such as Argon pressure during sputtering and the individual layer-thickness of SmCo and Cr layers,have strong effect on the magnetic properties.By adjusting these variables carefully,the films with the coercivity of 181kA/m can be prepared.