农药浓度光波导传感制备工艺研究

The Study of Optical Waveguides Pesticides Sensor

研究了农药浓度的光波导传感制备工艺,采用磁控溅射技术,在石英基板上制备康宁1737玻璃波导的工艺;同时,分析了成膜条件以及控制膜厚的因素。实验结果表明,溅射功率和靶基距是影响溅射沉积速率的关键因素,采用射频功率为100～200W、靶基距为4～6cm,衬底温度为20～25℃、真空度为0.38Pa、溅射时间为2～4h的工艺条件可以获得较快的沉积速率并形成良好的单膜波导,可为农药浓度的检测提供一种新的方法。

This paper studies the optical waveguide sensing the concentration of pesticides preparation,the corning 1737 glass waveguide formation technology were studied using magnetron sputtering on quartz substrates,and the film-forming conditions that control the film thickness were analysized. Experimental results show that sputtering power and sputtering target-substrate distance are the key factors of that deposition rate. The formation of good single-film waveguide. and a faster deposition rate can be got when RF power is 100 ～ 200W,target -substrate distance of 4 ～ 6cm,substrate temperature of 20 ～ 25 ℃ ,the vacuum degree 0. 38Pa,sputtering time of 2 ～ 4h. A new approach was provided for the detection concentration test of pesticide