多晶硅还原炉的电器设备

Electrical Equipments Of Polysilicon Reduction Furnace

目前,国际上多晶硅的生产,工艺大多采用改良西门子法,其关键设备为还原炉。本文介绍了国内常用的12对多晶硅棒还原炉之国产主要电器设备,并根据多晶硅生产的流程和工艺,说明选择这些电器设备参数的原则和依据,着重介绍了生产电子级多晶硅用的高压启动方式,以及可控硅调功器"拼波"的原理。

Currently, modified Siemens process and reduction fumace are extensively used in polysilicon production worldwide. In this paper, a domestic electrical system is described which can hold 12 polysilicon rods and is very common in China. Next, principle of parameters of electrical equipments is discussed based on the polysilieon production processes and techniques. It is represented in details that start mode with high-volt for the production of electronic grade polysilicon. And a stepless voltage regulation technique is considered as well which is based on the theory , of Voltage Sequence Control（VSC）.