VPS60型溅射离子泵电源的维修及调试方法

The Maintenance and Test Methods For Spluttering Ion Pump Power Supply of Model Vps 60

本文详尽地分析了VPS60型溅射离子泵的故障诊断及调试方法。将原电路整理简化为测量电路,保护、遥控电路及电源电路三大部分。在此基础上举出故障分析判断及排除事例,并总结了电路调整步骤。

The maintence and test methods for spluttering ion pump power supply of model VPS 60 are analysed detailedly. The circuit diagrams given in documents are simplified into three factional models, that is measurement circuit, protection and remote circuit, and power supply circuit. Some example that find fault are also given based on our analyses. The process of the circuit regulation is summed in the end.