摘要
为了满足汽车电子化、智能化的需要,越来越多的MEMS(微机电系统)传感器应用到汽车上。本文对主要的几种汽车MEMS传感器的应用状况和研究现状进行简述,并且对压力传感器和微加速度计的设计缺陷进行研究。同时,结合MEMS传感器的特点和车载传感器的要求,对汽车MEMS传感器的发展提出几点建议和展望。
In order to meet the needs of automotive electronics and intelligence,an increasing number of MEMS（Micro Electro Mechanical System） sensors are applied to the car.In this paper,the present application and the current research of several major automotive MEMS sensors are introduced,and the design flow of micro pressure sensor and accelerometer are studied.Meanwhile,combine the characteristics of MEMS sensors and the requirements of vehicle sensors,a few suggestions and prospects on the development of the automotive MEMS sensors are offered.
出处
《农业装备与车辆工程》
2010年第9期3-5,8,共4页
Agricultural Equipment & Vehicle Engineering
关键词
微机电系统
MEMS传感器
汽车
综述
micro electro mechanical system
MEMS sensor
automotive
summarize
