摘要
着重论述贝尔实验室关于半导体材料研究与工艺开发的历史过程.这包括锗和硅的制备,ⅢⅤ族半导体化合物,区域纯化法和区域致匀法,以及外延。
This paper discribes Bell laboratories reserch and development of the semiconductor materials. It relates briefly the development of materials and art in early stage, the Ge and Si making, ternary and quaternary semiconductors compounds, zone refining and zone levering, epitaxial method, impuring, and marking.
出处
《首都师范大学学报(自然科学版)》
1999年第2期37-43,共7页
Journal of Capital Normal University:Natural Science Edition