干涉仪光程差的遥测及其应用研究

Remote measuring System of the Optical Path Difference and Its Application

用由光纤串接的双白光迈克尔逊干涉仪所组成的干涉系统可以实现位移量的遥测。论述了该干涉系统的工作原理、实用设计和实验结果。在２０００μｍ的测量范围内遥测精度达到±０．５μｍ，并且传输精度既与光纤本身的损耗无关，也与接头或联接器的损耗无关，具有较强的实用性。将此系统应用于甲烷气体浓度的遥测，其精度达到±０．１１％，它相当于±０．０４μｍ的位移遥测精度。

Remote measuring of displacement can be carried out by using interferometric system composed of double white light Michelson interferometer which is connected in series by optical fibre . The basic principle ,applied design and experimental result are discussed here. The remote measuring accuracy of this system can reach ±0.5μm within 2000μm ,and the transfer accuracy is not only irrelevant to the loss of optical fibre ,but also to the loss of joints or connectors.So the system is practical .The system is applied to the remote measuring of methane density and its accuracy is ±0.11% ,which is about equal to ±0.04μm of displacement remote-measuring accuracy.