2K.Mizutani,T.Kawano,Y.Yanaka,A piezoelectric-drive table and its application to micro-grinding of ceramic materials[J],Precision Engineering,1990,12(4):219 -226.
3J.Otsuka,S.Koshimizu.An ultra-fine motion using piezoelectric actuator for ultra-precision grinding[ J ].Int.J.Japan Soc.Prec.Engg,1996,3(4):345 -346.
4Z.Zhong,T.Nakagawa,Development of a micro-displacement table for ultra-precision machining and grinding for curved surfaces by the use of it[ J ].International Journal of Japan Society Precision Engineering,1992,26 (2):102 -107.
5Mizutani K,Kawano T,Yanaka Y. A piezoelectric-drive table and its application to micro-grinding of ceramic materials [ J ]. Precision Engineering, 1990, 12 ( 4 ) : 219 - 226.
6Otsuka J, Koshimizu S. An ultra-fine motion using piezoelectric actuator for ultra-precision grinding [J]. Int. J. Japan Soc. Prec. Engg, 1996,3 (4) : 345 - 346.
7Zhong Z. Nakagawa T. Development of a micro-displacement table for ultraprecision machining and grinding for curved surfaces by the use of it [J]. International Journal of Japan Society Precision Engineering, 1992,26 (2) : 102 - 107.
