摘要
椭偏仪是目前薄膜光学参数测量最先进的智能化仪器，本文比较系统地介绍了仪器的结构原理、测量方法和发展现状。
Ellipsometer is the most advance, intelligent instrument for measuring the optical data of film. The paper introduces the principle, measuring method and developments of ellipsometer more systemally.
出处
《现代科学仪器》
1999年第3期58-61,共4页
Modern Scientific Instruments
关键词
光学薄膜
椭圆偏振光
椭偏仪
Cptical film Elliptically polarized light Ellipsometer
