摘要
大型非球面反射主镜的检测,国内通常采用离线的卧式检测。由于气流、温度变化以及地基振动等环境因素,容易影响检测的可靠性和重复性。国外在大型非球面反射主镜的检测中普遍采用在位或离线的立式检测塔。本文针对Φ1.07m,F/1.5非球面反射主镜在加工中的检测,在有限的加工环境中设计了一套分体式立式在位检测塔,由一个四维工作台调节平面反射镜来转折光路、一个五维工作台调节补偿器和一个五维工作台调节干涉仪以满足测量中自由度的调节需要。用有限元分析软件ANSYS对立式塔进行了应力和应变的设计分析以检验其刚性、重心位置和变形情况,以及避免与工件转台产生共振的模态分析。该检测塔在Φ1.07m,F/1.5非球面反射主镜加工过程中得以用于检测测量,获得了稳定的干涉图和良好的重复性,工件接近完工时的检测结果为PV=0.313λ,RMS=0.024λ。
In optical test for manufacturing large aspherical mirrors, horizontal test arrangements are used traditionally. Because of the environmental factors such as air turbulence, temperature variation and vibration ect., it is difficult to obtain the test results reliably and repeatedly. Online or offline vertical test towers are commonly applied in many countries. A vertical test tower used onlineWas designed in our workshop for testing an aspherical mirror Ф1.07 m, F/1.5. In order to fit for adjusting all freedom,-a four-dimensional and another two five-dimensional adjustable tables are designed to adjust a mirror, a null lens and an interferometer. In our jobs, the stress, the deformation and the vibration modules of the tower are formatted by finite element methods to avoid resonance. After our works, the stable interferograms and testing repeatability are got by the test tower in the process of manufacturing aspherical mirror Ф 1.07 m, F/1.5. The test result for nearly finishing is PV=0.313）λ and RMS=0.024λ.
出处
《光电工程》
CAS
CSCD
北大核心
2010年第9期104-109,共6页
Opto-Electronic Engineering
